Considering these things can shape shift into whatever they want and hide in plain sight, I find it a little hard to believe that we killed them all.
For all we know there's one laying low in the Tower as a desk lamp or a pulse rifle or whatever, how would we know for sure?
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So I just recently learned an interesting fact about the ahamkara. Their goal essentially is to be come as “real” as possible. As if they are aware they are in a game. They learned that being turned into weapons and armor, literally becoming data on our games, is the most real they have ever figured out how to be. So they are happy dying if it makes them more real.